Ion beam deflection magnet and ion beam irradiation apparatus including the same for the ribbon-like ion beam .

摘要

PROBLEM TO BE SOLVED: To provide an improved bending magnet which is adaptive to a ribbon-shaped ion beam having a cross-sectional shape with its major dimension normal to a bending plane of the bending magnet and is configured to bend the beam.;SOLUTION: An ion beam bending magnet 13 provides a curved path 16 for a ribbon-shaped ion beam having a cross-sectional shape with its major dimension normal to a bending plane of the bending magnet. The bending magnet 13 comprises a ferromagnetic yoke 25 surrounding the beam path 16 and having a cross-sectional internal profile with four angled sides. The angled sides are angled to the major dimension of the ribbon beam such that the internal profile is relatively wide in a center of the ribbon beam and relatively narrow near top and bottom edges of the ribbon beam. Electrical conductors 50, 51 against internal surfaces of the yoke 25 provide a uniform distribution of electrical current per unit length along the angled sides, thereby generating a substantially uniform magnetic bending field within the yoke 25.;COPYRIGHT: (C)2014,JPO&INPIT