Mach -Zehnder interferometer , method of manufacturing an array waveguide grating and Mach -Zehnder interferometer

摘要

PROBLEM TO BE SOLVED: To provide a low-loss Mach-Zehnder interferometer which can reduce temperature dependence of wavelength characteristics, and to provide an arrayed waveguide diffraction grating and a method for manufacturing the Mach-Zehnder interferometer.;SOLUTION: The Mach-Zehnder interferometer includes arm parts 10a and 10b transmitting light branched from incident light. The arm part 10a (10b) includes: a silicon thin line waveguide 11a (11b); a silicon waveguide 12a (12b); and a waveguide 13a (13b). The silicon waveguide 12a (12b) is wider than the silicon thin line waveguide 11a (11b). The waveguide 13a (13b) has one end optically connected to one end of the silicon waveguide 12a (12b), and is made of a material different from those of the silicon thin line waveguide 11a (11b) and the silicon waveguide 12a (12b). One end of the silicon thin line waveguide 11a (11b) is optically connected to the other end of the silicon waveguide 12a (12b) or the other end of the waveguide 13a (13b).;COPYRIGHT: (C)2012,JPO&INPIT