Bell jar cleaning method, a method for producing polycrystalline silicon, and bell jar for drying equipment

摘要

The bell jar, the bell jar of gold attribute (1) and to install this bell jar the baseplate of gold attribute in order (1) has (2), inside of the container is closed airtight by the gasket (3). In order the bell jar (1) for the monitor of internal pressure and introduction and exhaust of the gas to become possible, the manometer (4), the gas introduction line (5), the gas exhaust line (6), is connected to the baseplate (2). The gas exhaust line (6) the vacuum blower (7) is provided in route, in order internal pressure of the bell jar to become lower than vapor pressure of the water this vacuum blower (7) with, is decompressed. In order internal pressure of the bell jar to become lower than vapor pressure of the water the vacuum blower (7) with, it is decompressed, removal of the moisture is done efficiently with this, drying the bell jar ends at brief. With this invention, raising the purity of the surface inside the bell jar, the technology which contributes to the production of high purity polycrystal silicon is offered.