Optical film thickness measurement apparatus and the optical film thickness measuring apparatus thin film forming apparatus using the

摘要

Without using the monitor substrate is measured directly with the thickness of the product in real time and to provide an optical film thickness measuring apparatus for measuring with high precision. Optical film thickness measuring device includes a light projecting unit, a light receiving section, and an internal beam splitter in the plurality of base holding means for reflecting the measurement light to the substrate, from the nearest inside the beam splitter out of the plurality of internal beam splitter and an internal light reflecting member the measuring light is totally reflected, toward a plurality of external beam splitter for reflecting the light receiving unit measuring light from a plurality of internal beam splitter, the measurement light from the light reflecting member to the light receiving part reflection It has an external light reflection member. The measurement light reflected by the internal beam splitter and internal light reflection member, after it was transmitted through the substrate, leading to the light receiving portion can be reflected by external beam splitter and an external light reflecting member, for receiving the measurement light.