Clogging detection instrument of nozzles and an electronic component testing apparatus having the same

摘要

[Problem] A detection/measurement unit that detects clogging of a nozzle that suctions an electronic component or semiconductor product by means of vacuum force, and an electronic component inspection device provided with the detection/measurement unit. [Solution] A nozzle (V1) that has completed a preceding step of a nozzle clog detection unit (10) stops at a stopping position on a vertical axis with respect to the contact section (22) of a flow rate detection unit (20) of the nozzle clog detection unit (10). The suction nozzle (V1) descends vertically from the stopping position, and the flow path within the nozzle (V1) and the tip flow path of the flow rate sensor (20) form a single flow path. Negative pressure is generated in the pump of the suction nozzle (V1), causing the air within the flow rate detection unit (20) to flow in. The flow rate detection unit (20) measures the flow rate of the air flowing therewithin when air flows in by means of a sensor unit (21). The results measured by the sensor unit (21) are output to the control unit (40) as detection data (A). Nozzle clogging is detected on the basis of the detection data (A) output from the sensor unit (21).