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Novel methods of making and using halo silyl Germanic
Novel methods of making and using halo silyl Germanic
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机译:制备和使用卤代甲硅烷基日耳曼语的新方法
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摘要
The invention provides compounds of, and methods for the preparation of compounds of, the molecular formula, SixGeyHz—aXa; wherein X is halogen, and x, y, z, and a are defined herein, and methods for the deposition of high-Ge content Si films on silicon substrates using compounds of the invention.
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