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ION BEAM UNIFORMITY CONTROL USING ION BEAM BLOCKERS
ION BEAM UNIFORMITY CONTROL USING ION BEAM BLOCKERS
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机译:使用离子束阻滞剂控制离子束均匀性
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摘要
A method of achieving ion beam uniformity control using ion beam blockers. The method includes generating an ion beam, detecting a current profile of said ion beam with an ion beam blocker unit, wherein said detected current profile is an initial current profile, blocking a portion of said ion beam with said ion beam blocker unit to achieve a second current profile that is different from the initial current profile, and implanting said ion beam into a workpiece after said blocking.
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