首页>
外国专利>
DAILY CHECKING AND CALIBRATING METHOD OF LENGTH MEASURING MACHINE
DAILY CHECKING AND CALIBRATING METHOD OF LENGTH MEASURING MACHINE
展开▼
机译:测长机的日常检查和校准方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A daily checking and calibrating method of a length measuring machine is disclosed. The method includes the following steps. Step (1) is for detecting a state of the length measuring machine at a predetermined daily check time. Step (2) is for stopping the transportation of substrates upon determining the length measuring machine is in an idle state. Step (3) is for measuring coordinates of positioning marks on a substrate-carrying platform to generate a measured data file and comparing the measured coordinates of the positioning marks with predetermined standard coordinates. Step (4) is for automatically calculating a calibration value when a difference between the measured coordinates of the positioning marks and the predetermined standard coordinates is smaller than a predetermined value and updating the calibration value to a coordinate parameter file to complete automatic calibration. Otherwise, an alarm is activated. Step (5) is for determining follow-up measures when the difference between the measured coordinates of the positioning marks and the predetermined standard coordinates is larger than the predetermined value. The determination is made in accordance with a predicted reason causing the difference. The follow-up measures include automatic calibration, no calibration, and additional measurements of large-scale substrate.
展开▼