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DIFFRACTION GRATING, LASER APPARATUS, AND MANUFACTURING METHOD FOR DIFFRACTION GRATING
DIFFRACTION GRATING, LASER APPARATUS, AND MANUFACTURING METHOD FOR DIFFRACTION GRATING
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机译：衍射光栅，激光装置和衍射光栅的制造方法
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摘要
This diffraction grating is a reflection-type diffraction grating that has a grating, the cross section of which is an asymmetrical triangular shape, and wherein given that θ denotes an angle between a short side and a base of the triangular shape, and φ denotes an angle between the short side and a long side of the triangular shape, and α denotes an incident angle of light to a normal of the base, the angles θ and φ satisfy a condition represented by the following formulas:; φ+θ≦90+α,; 0.1127291(φ−φd)2−19.67453(φ−φd)+938.74+θd≦θ≦0.36631(φ−φd)+48.84+θd where φd=0.845σ and θd=1.065σ, in σ=α−79.25展开▼
机译：该衍射光栅是具有截面为非对称三角形的光栅的反射型衍射光栅，其中，θ表示三角形的短边与底边之间的角度，而φ表示α。三角形的短边和长边之间的角度，并且α表示光相对于基体的法线的入射角，角度θ和φ满足下式表示的条件： <？in-line-formulae description =“在线公式” end =“ lead”？>φ+θ≦90 +α，<？in-line-formulae description =“在线公式” end =“ tail” ？>; <？in-line-formulae description =“在线公式” end =“ lead”？> 0.1127291（φ−φ d ） 2 −19.67453（φ−φ d ）+ 938.74 +θ d ≦θ≦0.36631（φ−φ d ）+ 48.84 +θ d <？in-line-formulae description =“在线公式” end =“ tail”？> 其中φ d =0.845σ和θ d =1.065σ，在σ= α−79.25
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