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System for real-time analysis of material distribution in CIGS thin film using laser-induced breakdown spectroscopy
System for real-time analysis of material distribution in CIGS thin film using laser-induced breakdown spectroscopy
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机译:激光诱导击穿光谱实时分析CIGS薄膜中材料分布的系统
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摘要
The present invention relates to a process control system which can measure the physical properties of a CIGS thin film in real-time in a continuous production line of a CIGS thin film solar cell, more specifically to a system for real-time analysis of material distribution of a CIGS thin film comprising: a header, which comprises a laser irradiation unit producing plasma from the CIGS thin film by irradiating a laser beam to a part of the CIGS thin film; and a spectrum detection optical unit detecting a spectrum generated from the plasma; a transfer unit, which transfers the header at the same rate and to the direction with the transfer rate and direction of the CIGS thin film; and a spectrum analysis unit, which analyzes the spectrum detected by the spectrum detection optical unit.
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