首页> 外国专利> VIBRATING REED, ANGULAR VELOCITY SENSOR, ELECTRONIC DEVICE, MOVING OBJECT, AND METHOD FOR MANUFACTURING VIBRATING REED

VIBRATING REED, ANGULAR VELOCITY SENSOR, ELECTRONIC DEVICE, MOVING OBJECT, AND METHOD FOR MANUFACTURING VIBRATING REED

机译:振动簧片,角速度传感器,电子设备,移动物体以及制造振动簧片的方法

摘要

The vibrating reed includes a detection unit that vibrates along the thickness direction of a piezoelectric body when detecting. The detection unit includes a first main surface and a second main surface that face each other in the thickness direction, outside surfaces, a groove that has a groove bottom at a position between the first main surface and the second main surface in a depth direction from an opening provided in the first main surface, an outside surface electrode that is formed on the outside surfaces, and an inside surface electrode that is formed on an inside surface which is opposite the outside surfaces. At least one of the outside surfaces has a non-electrode-formed area where the outside surface electrode is not provided in an area from the end surface which positioned on the second main surface side in the thickness direction to the second main surface.
机译:振动片包括检测单元,该检测单元在检测时沿着压电体的厚度方向振动。检测单元包括在厚度方向上彼此面对的第一主表面和第二主表面,外表面,在深度方向上从第一主表面和第二主表面之间的位置起在其底部具有槽底的槽。设置在第一主表面上的开口,在该外表面上形成的外表面电极以及在与该外表面相对的内表面上形成的内表面电极。至少一个外表面在从位于厚度方向上的第二主表面侧上的端面到第二主表面的区域中具有未形成外表面电极的非电极形成区域。

著录项

  • 公开/公告号US2015114116A1

    专利类型

  • 公开/公告日2015-04-30

    原文格式PDF

  • 申请/专利权人 SEIKO EPSON CORPORATION;

    申请/专利号US201414526942

  • 发明设计人 ATSUSHI MATSUO;

    申请日2014-10-29

  • 分类号G01C19/5607;H03H9/21;H03H3/04;H01L41/047;

  • 国家 US

  • 入库时间 2022-08-21 15:23:47

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