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VIBRATING REED, ANGULAR VELOCITY SENSOR, ELECTRONIC DEVICE, MOVING OBJECT, AND METHOD FOR MANUFACTURING VIBRATING REED
VIBRATING REED, ANGULAR VELOCITY SENSOR, ELECTRONIC DEVICE, MOVING OBJECT, AND METHOD FOR MANUFACTURING VIBRATING REED
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机译:振动簧片,角速度传感器,电子设备,移动物体以及制造振动簧片的方法
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摘要
The vibrating reed includes a detection unit that vibrates along the thickness direction of a piezoelectric body when detecting. The detection unit includes a first main surface and a second main surface that face each other in the thickness direction, outside surfaces, a groove that has a groove bottom at a position between the first main surface and the second main surface in a depth direction from an opening provided in the first main surface, an outside surface electrode that is formed on the outside surfaces, and an inside surface electrode that is formed on an inside surface which is opposite the outside surfaces. At least one of the outside surfaces has a non-electrode-formed area where the outside surface electrode is not provided in an area from the end surface which positioned on the second main surface side in the thickness direction to the second main surface.
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