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Laser With High Quality, Stable Output Beam, And Long Life High Conversion Efficiency Non-Linear Crystal
Laser With High Quality, Stable Output Beam, And Long Life High Conversion Efficiency Non-Linear Crystal
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机译:高品质,稳定的输出光束,长寿命,高转换效率的非线性晶体激光器
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摘要
An optical system for detecting contaminants and defects on a test surface includes an improved laser system for generating a laser beam and optics directing the laser beam along a path onto the test surface, and producing an illuminated spot thereon. A detector and ellipsoidal mirrored surface are also provided with an axis of symmetry about a line perpendicular to the test surface. In one embodiment, an optical system for detecting anomalies of a sample includes the improved laser system for generating first and second beams, first optics for directing the first beam of radiation onto a first spot on the sample, second optics for directing the second beam onto a second spot on the sample, with the first and second paths at different angles of incidence to the sample surface. In another embodiment, a surface inspection apparatus includes an illumination system configured to focus beams at non-normal incidence angles.
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