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Method for providing a magnetic recording transducer using a combined main pole and side shield CMP for a wraparound shield scheme

机译:提供一种使用磁记录换能器的方法,该磁记录换能器使用组合的主极和侧屏蔽CMP来实现环绕式屏蔽方案

摘要

A method fabricates a magnetic transducer having a nonmagnetic layer and an ABS location corresponding to an ABS. A pole trench is provided in the nonmagnetic layer. The pole trench has a pole tip region and a yoke region. At least one pole material is provided. The pole material(s) have an external protrusion that is above and external to the pole trench. A hard mask that covers at least the external protrusion is provided. A portion of the nonmagnetic layer adjacent to the pole trench is removed to form a side shield trench. At least one side shield material is provided. A portion of the side shield material(s) are adjacent to the hard mask and fill at least a portion of the side shield trench. The side shield material(s) and the pole material(s) are planarized to form at least one side shield and a main pole.
机译:一种方法制造具有非磁性层和对应于ABS的ABS位置的磁换能器。在非磁性层中设置有极槽。极槽具有极尖区域和轭区域。提供至少一种极材料。极材料具有在极槽上方和外部的外部突起。提供了至少覆盖外部突起的硬掩模。去除与极沟槽相邻的非磁性层的一部分以形成侧屏蔽沟槽。提供至少一种侧屏蔽材料。侧屏蔽材料的一部分与硬掩模相邻并且填充侧屏蔽沟槽的至少一部分。侧屏蔽材料和极材料被平坦化以形成至少一个侧屏蔽和主极。

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