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Magnetic recording media with small grain size and narrow c-axis dispersion by using dual seed layer with substrate bias

机译:通过使用具有衬底偏置的双晶种层来实现小晶粒尺寸和窄c轴色散的磁记录介质

摘要

Media may be produced with narrow c-axis dispersion while having small grain size and high grain density. A dual seed layer design and a substrate bias voltage may be applied during deposition of the seed layer are used in the media. In some embodiments, the first seed layer is an amorphous material because of a high content of elements with large atomic sizes. Application of the substrate bias during deposition of the second seed layer may reduce the grain size and may narrow c-axis dispersion.
机译:可以以窄的c轴分散度生产介质,同时具有较小的粒度和较高的粒度。可以在介质中使用种子层的沉积过程中施加双重种子层设计和衬底偏置电压。在一些实施例中,由于高含量的具有大原子尺寸的元素,第一种子层是非晶材料。在第二种子层的沉积期间施加衬底偏压可以减小晶粒尺寸并且可以使c轴分散变窄。

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