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Magnetic recording media with small grain size and narrow c-axis dispersion by using dual seed layer with substrate bias
Magnetic recording media with small grain size and narrow c-axis dispersion by using dual seed layer with substrate bias
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机译:通过使用具有衬底偏置的双晶种层来实现小晶粒尺寸和窄c轴色散的磁记录介质
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摘要
Media may be produced with narrow c-axis dispersion while having small grain size and high grain density. A dual seed layer design and a substrate bias voltage may be applied during deposition of the seed layer are used in the media. In some embodiments, the first seed layer is an amorphous material because of a high content of elements with large atomic sizes. Application of the substrate bias during deposition of the second seed layer may reduce the grain size and may narrow c-axis dispersion.
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