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Optical sensors for detecting relative motion and/or position and methods and systems for using such optical sensors
Optical sensors for detecting relative motion and/or position and methods and systems for using such optical sensors
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机译:用于检测相对运动和/或位置的光学传感器以及使用这种光学传感器的方法和系统
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摘要
An optical sensor, according to an embodiment of the present invention, includes a photodetector region and a plurality of slats over the photodetector region. In an embodiment, the slats are made up of a plurality of metal layers connected in a stacked configuration with a plurality of metal columns. The metal columns can be made of metal vias, metal contacts and/or metal plugs. In an embodiment, the slats are angled relative to a surface of the photodetector region, wherein the angling of the slats is achieved by the metal layers being laterally offset relative to one another and/or metal columns being laterally offset relative to one another. In an alternative embodiment, the slats are made of an opaque polymer material, such as an opaque photoresist.
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