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Bolometric detector of an electromagnetic radiation in the terahertz range and detector array device comprising said detectors
Bolometric detector of an electromagnetic radiation in the terahertz range and detector array device comprising said detectors
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机译:太赫兹范围内的电磁辐射的容积式探测器和包括所述探测器的探测器阵列设备
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摘要
A bolometric detector of a terahertz radiation, including an assembly reflective for said electromagnetic radiation; at least one bolometric microbridge suspended above the reflective assembly and including a first bowtie antenna, a resistive load coupled with said antenna, and a thermometric element coupled with the resistive load. The reflective assembly includes a reflective layer; an insulating layer on the reflective layer; a periodic array of metallic patterns on the insulating layer, the thickness and the dielectric permittivity of the insulating layer, and the pitch and the filling factor of the array being selected to obtain a constructive interference at the level of said microbridge.
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