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Method of manufacturing light absorbing layer for solar cell using selenization process under element selenium vapor ambience and thermal treatment apparatus for manufacturing light absorbing layer
Method of manufacturing light absorbing layer for solar cell using selenization process under element selenium vapor ambience and thermal treatment apparatus for manufacturing light absorbing layer
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机译:在硒硒气氛下使用硒化工艺制造太阳能电池吸光层的方法及制造吸光层的热处理装置
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摘要
A method of manufacturing a light absorbing layer for a solar cell by performing thermal treatment on a specimen configured to include thin films of one or more of copper, indium, and gallium on a substrate and element selenium, includes steps of: heating a wall of a chamber up to a predefined thin film formation temperature in order to maintain a selenium vapor pressure; mounting the specimen and the element selenium on the susceptor at the room temperature and loading the susceptor in the chamber; and heating the specimen in the lower portion of the susceptor and, at the same time, heating the element selenium in the upper portion of the susceptor.
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