首页> 外国专利> Method of manufacturing light absorbing layer for solar cell using selenization process under element selenium vapor ambience and thermal treatment apparatus for manufacturing light absorbing layer

Method of manufacturing light absorbing layer for solar cell using selenization process under element selenium vapor ambience and thermal treatment apparatus for manufacturing light absorbing layer

机译:在硒硒气氛下使用硒化工艺制造太阳能电池吸光层的方法及制造吸光层的热处理装置

摘要

A method of manufacturing a light absorbing layer for a solar cell by performing thermal treatment on a specimen configured to include thin films of one or more of copper, indium, and gallium on a substrate and element selenium, includes steps of: heating a wall of a chamber up to a predefined thin film formation temperature in order to maintain a selenium vapor pressure; mounting the specimen and the element selenium on the susceptor at the room temperature and loading the susceptor in the chamber; and heating the specimen in the lower portion of the susceptor and, at the same time, heating the element selenium in the upper portion of the susceptor.
机译:通过对被配置为在基板和元素硒上包括铜,铟和镓中的一种或多种的薄膜的样品进行热处理来制造太阳能电池的光吸收层的方法,包括以下步骤:加热硅的壁。为了维持硒蒸气压,使腔室达到预定的薄膜形成温度。在室温下将样品和元素硒安装在基座上并将基座装入腔室中;在基座的下部加热样品,同时在基座的上部加热元素硒。

著录项

  • 公开/公告号US9054267B2

    专利类型

  • 公开/公告日2015-06-09

    原文格式PDF

  • 申请/专利权人 SEMICS INC.;

    申请/专利号US201414514691

  • 发明设计人 SEONG HOON SONG;

    申请日2014-10-15

  • 分类号H01L21;H01L31/18;H01L31/032;

  • 国家 US

  • 入库时间 2022-08-21 15:17:17

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