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Ionic field effect transistor having heterogeneous triangular nanochannel and method of manufacturing the same
Ionic field effect transistor having heterogeneous triangular nanochannel and method of manufacturing the same
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机译:具有异质三角形纳米通道的离子场效应晶体管及其制造方法
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摘要
An ionic field effect transistor includes: a substrate; a polymer layer that is formed on the substrate and in which a first flow path and a second flow path that is separately disposed from the first flow path are formed; and a gate electrode that is formed between the substrate and the polymer layer and that contacts the first flow path and the second flow path, wherein a heterogeneous triangular nanochannel that connects the first flow path and the second flow path is formed between the gate electrode and the polymer layer.
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