Method of evaluating adhesion of a functional layer to a substrate by making use of acoustic emission

摘要

The present invention relates to a method of evaluating adhesion of a functional layer to a substrate by making use of scratch test acoustic emission during continuous monitoring and record of a nanoindenter (4) load force and position relative to a test specimen (5) and scanning nanoindentation process acoustic emission wherein the invention is characterized in that both data of the scratch test being carried out comprising dependencies of an indentation depth on the load force magnitude acting on the nanoindenter (4) all over the length of the scratch test are monitored and acoustic emission of the actual process is simultaneously detected wherein the obtained data are continuously transformed into graphical representation of data files being independent on each other, which files are subsequently along with micro-snapshots of indentation dent completed to the instant of the scratch test start, whereupon critical adhesion limit LICA between the substrate (51) and the test specimen (5) surface layer (52) is determined by graph evaluation.