a cooling system u043cu0430u0433u043du0435u0442u0440u043eu043du043du043e - u0440u0430u0441u043fu044bu043bu0438u0442u0435u043bu044cu043du043eu0433u043e cylindrical type device

摘要

the invention relates to a plasma technology and is designed for vacuum ion plasma coating of thin films of metals, semiconductors, and density and x compounds on the surface of solid bodies.the technical result is the productivity u043cu0430u0433u043du0435u0442u0440u043eu043du043du043eu0439 spray system of cylindrical type process, to ensure the complete removal of'm cooling with the refrigerant and simplify the design u043cu0430u0433u043du0435u0442u0440u043eu043du0430.the system contains the node 1 to the vacuum chamber, the supply and drain channels which are 2 to 3 cooling liquid and compressed air, the motor 4, u0440u0435u043cu0435u043d noah drive rotation of 15 u0440u0430u0441u043fu044bu043bu0438u0442u0435u043bu044cu043du043eu0433u043e block 7, the cylindrical target 5, 6 with a drive control system of a belt 17, lagrange support pipes 8 with the magnetic systemthe front 10 and the flange 11 of the target with rubber means 12. the flange 11 contains a radial hole 13, united with the fixed support pipe 8.the front flange 10 of a target 5 additionally contains radial openings 14, with the radial openings of the front and rear flanges 10, 11 connected and the target are cross cutting in the direction of forming the flanges of their central axis and connected with the channels 2, 3 supply and exhaust the coolant.control system with drive speed control system 6 includes 16 speed of rotation and fixation u0440u0430u0441u043fu044bu043bu0438u0442u0435u043bu044cu043du043eu0433u043e unit 7 with a cylindrical target 5 in any u043du0430u043fu0435u0440 ed a set position.the control system of the belt 17 16 contains u043au0438u043du0435u043cu0430u0442u0438u0447u0435u0441u043au0438 related reference star 19 guided u0448u0435u0441u0442u0435u0440u043du0435u0439 18 speed transmission u0440u0430u0441u043fu044bu043bu0438u0442u0435u043bu044cu043du043eu0433u043e blo ka 7, and one with 20 stars 19 by the width of the control