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MEMS ANCHOR AND SPACER STRUCTURE

机译:MEMS锚和间距结构

摘要

A display apparatus includes a first substrate a plurality of microelectromechanical systems (MEMS) light modulators formed from a structural material coupled to the first substrate and a second substrate separated from the first substrate. A plurality of spacers extend from the first substrate to keep the second substrate a minimum distance away from the plurality of light modulators. The spacers include a first polymer layer having a surface in contact with the first substrate a second polymer layer encapsulating the first polymer layer and a layer of the structural material encapsulating the second polymer layer. The spacers can be used as fluid barriers and configured to surround more than one but less than all of the MEMS light modulators in the display apparatus.
机译:一种显示设备,包括第一基板,多个微机电系统光调制器,所述微机电系统光调制器由与第一基板耦合的结构材料形成,以及与第一基板分离的第二基板。多个间隔物从第一基板延伸以使第二基板与多个光调制器保持最小距离。间隔物包括第一聚合物层,该第一聚合物层的表面与第一基板接触;第二聚合物层封装第一聚合物层;以及结构材料层封装第二聚合物层。隔离物可以用作流体屏障,并且被配置为包围显示设备中的一个以上但少于所有的MEMS光调制器。

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