WATER VAPOR REFLOW DEVICE AND WATER VAPOR REFLOW METHOD

摘要

The purpose of the present invention is to provide a water vapor reflow device and water vapor reflow method that use superheated water vapor and that make practical use possible. A water vapor reflow device (1) provided with a heating furnace (2) having a preheating zone (Z2), a soaking zone (Z3), a melting zone (Z4), and a cooling zone (Z5), to each of which heated water vapor is supplied, wherein a furnace exit-side condensation prevention zone (Z6) and a furnace entrance-side condensation prevention zone (Z1) to which air or nitrogen gas heated by a heater (H1) to 100°C or higher is fed are respectively provided adjacent to the downstream of the cooling zone (Z5)and to the upstream of the preheating zone (Z2) to which superheated water vapor is fed. When a substrate (S) enters the heating furnace (2), and when the substrate (S) exits the heating furnace (2), the water vapor that has come into contact with the substrate (S) can be prevented from falling to 100°C or lower, liquefying, and condensing, and therefore a practicable water vapor reflow can be realized.