Optical displacement measuring apparatus and multifunctional optical displacement measuring apparatus

摘要

In an optical displacement measuring apparatus, the displacement of a measuring object can be measured while increasing the degree of freedom in length of a lens-barrel portion for introducing light from a light source to the measuring object.;An optical displacement measuring apparatus (10) includes a lens-barrel portion (22) introducing light from a light source (70) to an objective optical system as approach route light (82); a prism optical element (26/a) mirror optical element (28), as the objective optical system, leading the light to a side (6) of a casing (8) that is a measuring object by changing the optical path of the approach route light (82) so as to return the light to the lens-barrel portion (22) as way back light (84) in parallel with the approach route light (82) by refracting the regularly reflected light from the side; an imaging lens (76) having an optical axis (86) in parallel with the approach route light (82) for condensing the way back light; a pinhole optical element (78) arranged at the focal point of the imaging lens (76) to allow only the way back light (84) in parallel with the approach route light (82) to pass through; and an optical positional detecting device (80) detecting the position of the light that has passed through the pinhole optical element (78).