RESONANT HIGH FREQUENCY POWER SOURCE DEVICE AND SWITCHING CIRCUIT FOR RESONANT HIGH FREQUENCY POWER SOURCE DEVICE

摘要

The present invention is provided with a power element for performing a switching operation, the resonant high frequency power source device being provided with: a high frequency pulse drive circuit (1) for sending a pulsed voltage signal at a high frequency (2 MHz) to the power element and driving the power element; a variable pulse signal generating circuit (2) for sending a pulse voltage signal at a high frequency (2 MHz) to the high frequency pulse drive circuit (1) and driving the high frequency pulse drive circuit (1); and a biasing power source circuit (3) for supplying drive power to the variable pulse signal generating circuit (2) and the high frequency pulse drive circuit (1).