METHOD FOR THE ABSOLUTE MEASUREMENT OF THE FLATNESS OF THE SURFACES OF OPTICAL ELEMENTS

摘要

In said method, an interferometer (6) having a measurement axis (Z) is used to carry out the three-plane method using three optical elements by performing real measurements on the latter, and the planes of the elements are reconstructed by means of an iterative processing in which the measurements are simulated and the simulated measurements are compared with the real measurements. According to the invention, at least two of the real measurements are made after a rotation about the measurement axis and/or a translation perpendicular to said axis of one measured optical element (18) relative to the other (20).