首页>
外国专利>
SUB 200NM LASER PUMPED HOMONUCLEAR EXCIMER LASERS
SUB 200NM LASER PUMPED HOMONUCLEAR EXCIMER LASERS
展开▼
机译:SUB 200NM激光泵浦单核准分子激光器
展开▼
页面导航
摘要
著录项
相似文献
摘要
Disclosed are methods and apparatus for generating a sub-200 nm continuous wave (cw) laser. A laser apparatus includes a chamber for receiving at least a rare gas or rare gas mixtures and a pump laser source for generating at least one cw pump laser focused in the chamber for generating at least one laser-sustained plasma in the chamber. The laser apparatus further includes a system for forming an optical cavity in which the at least one laser-sustained plasma serves as an excitation source for producing at least one cw laser having a wavelength that is below about 200 nm. In one aspect, the at least one laser-sustained plasma has a shape that substantially matches a shape of the optical cavity.
展开▼