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MASS DISTRIBUTION SPECTROMETRY METHOD AND MASS DISTRIBUTION SPECTROMETER
MASS DISTRIBUTION SPECTROMETRY METHOD AND MASS DISTRIBUTION SPECTROMETER
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机译:质量分布谱法和质量分布谱仪
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摘要
The present invention provides a mass distribution spectrometry which reduces an influence of the dispersion in the times at which ionizing beams irradiate a sample, on a mass spectrometry result, and can measure the mass distribution with high reliability. The mass distribution spectrometry is a mass spectrometry which includes irradiating the sample with a primary ion beam and detecting generated secondary ions, wherein this primary ion beam has a spread toward a direction perpendicular to a travelling direction, has a path length of each primary ion contained in the primary ion beam between a primary ion source and a surface of the sample adjusted by deflecting a trajectory, and is obliquely incident on the surface of the sample.
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