ELECTRIC FORCE AND MAGNETIC FORCE MICROSCOPE AND SIMULTANEOUS ELECTRIC FIELD AND MAGNETIC FIELD MEASUREMENT METHOD

摘要

An electric force and magnetic force microscope (1) provided with: a probe member (11) having a soft magnetic probe (112); a probe excitation unit (12) for exciting the probe member (11); an alternating electric field application unit (131) and an alternating magnetic field application unit (132) for applying an alternating electric field and an alternating magnetic field having different frequencies to the soft magnetic probe (112); an alternating electric field driving unit (141) and an alternating magnetic field driving unit (142) for driving the alternating electric field application unit (131) and the alternating magnetic field application unit (132); a probe vibration detection unit (15) for detecting the vibration of the probe member (11) and generating a vibration detection signal (VIB); a probe scanning unit (16) for scanning a sample (SMPL) using the soft magnetic probe (112); a demodulation unit (17) for acquiring the vibration detection signal (VIB) and demodulating the alternating electric force and alternating magnetic force generated between the sample (SMPL) and the soft magnetic probe (112); an electric field measurement unit (181) for using the demodulated alternating electric force to measure the electric field generated by the sample (SMPL); and a magnetic field measurement unit (182) for using the demodulated alternating magnetic force to measure the magnetic field generated by the sample (SMPL).