ORIGINAL PLATE INSPECTION METHOD, METHOD FOR PREPARING ORIGINAL PLATE FOR INSPECTION, AND ORIGINAL PLATE

摘要

This original plate inspection method has: a step for preparing an original plate for inspection, having a second pattern that corresponds to a first pattern provided to the original plate, and a third pattern that is provided to a second surface which is the surface opposite from the surface provided with the second pattern; a step for enlarging a lithographic original plate for inspection; a step, following enlargement of the original plate for inspection, for comparing the dimensions of the pre-enlargement third pattern and the post-enlargement third pattern, and calculating the enlargement factor of the third pattern; a step, following enlargement of the lithographic original plate for inspection, for acquiring defect location information for the second pattern; and a step for acquiring defect location information for the first pattern of the original plate, on the basis of the defect location information for the post-enlargement second pattern, and the enlargement factor of the post-enlargement third pattern.