Device and method of humidity compensated gas concentration monitoring by thermal conductivity measurements

摘要

A sensor (10) and methods for monitoring a parameter relating to the concentration of a fluid components are described using one or more heat sources (15) and at least one thermal conductivity detector (16,17) for measuring a quantity relating to temperature with the at least one detector (16,17) being located at a fixed distance from the one or more heat sources (15), and a humidity sensor (22) spatially separated from the one or more heat sources (15) and from the at least one detector (16,17) while being exposed to essentially the same fluid, and using said humidity measurement as a correction parameter for the concentration measurement.