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GAS SENSOR MEMBER USING COMPOSITE OF HOLLOW SPHERE STRUCTURED METAL OXIDE SEMICONDUCTOR FILM AND GRAPHENE, AND MANUFACTURING METHOD THEREOF
GAS SENSOR MEMBER USING COMPOSITE OF HOLLOW SPHERE STRUCTURED METAL OXIDE SEMICONDUCTOR FILM AND GRAPHENE, AND MANUFACTURING METHOD THEREOF
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机译:空心球状结构的金属氧化物膜与石墨烯的复合气体传感器及其制造方法
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摘要
The present invention relates to a gas sensor member and a method for manufacturing the same and, specifically, to a gas sensor member comprising a hollow structure metal oxide semiconductor film and graphene and a method for manufacturing the same. Disclosed is the gas sensor member comprising at least one hollow structure metal oxide semiconductor film, and a graphene layer attached to the hollow structure metal oxide semiconductor film. According to the present invention, the gas sensor member is formed by using a complex of a hollow structure metal oxide semiconductor film and a graphene layer attached to the same. Therefore, disclosed are the gas sensor member having high sensitivity properties to detect a trace amount of gas, faster reaction rate and recovery rate, mechanical stability to endure an external physical stress, and selectivity to detect various gases; and the method for manufacturing the same.
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