REMOTE PLASMA SYSTEM HAVING SELF-MANAGEMENT FUNCTION AND SELF-MANAGEMENT METHOD OF SAME

摘要

A remote plasma system having a self-management function of the present invention can allow a process manager to check the operation state of a remote plasma generator by measuring the operation state of the remote plasma generator during the operation of the remote plasma generator which generates plasma to remotely supply the plasma to a process chamber and perform necessary process control according to the operation state. The remote plasma system having a self-management function of the present invention can determine whether the remote plasma generator is normally operated and immediately detect abnormality during operation by checking the operation state information of the remote plasma generator in real time. Also, the remote plasma system can check the operation state information of the remote plasma generator and plasma treatment process state information in the process chamber in real time while the plasma generated by the remote plasma generator is supplied to the process chamber. Therefore, the process manager can check the operation state of the remote plasma system in real time and immediately cope with an abnormal operation. Also, the process manager can check the need for maintenance of the system in real time, thereby improving maintenance efficiency.;COPYRIGHT KIPO 2015