YIELD MANAGEMENT SYSTEM AND METHOD FOR ROOT CAUSE ANALYSIS USING MANUFACTURING SENSOR DATA

摘要

Disclosed are a system and a device for analyzing product manufacturing process. According to an embodiment of the present invention, a system for analyzing a yield of a product includes a data extracting part extracting sensor data from multiple sensors included in a manufacturing facility, a reference signal generating part generating a reference signal of each of the sensors from the sensor data, and a sensor detecting part detecting at least one sensor correlated with the yield of the product by using the sensor data and the reference signal.