METHOD OF QUANTITATIVE ANALYSIS OF ELEMENTS IN CIGS FILM USING LASER INDUCED BREAKDOWN SPECTROSCOPY

摘要

An embodiment of the present invention relates to a quantitative analysis method for a CIGS thin film, which comprises: a step of obtaining spectral lines by radiating laser to multiple CIGS thin films with different element compositions from one another; a step of selecting a first spectral line and a second spectral line among the spectral lines of elements to be analyzed, and of obtaining a correlation plot of a measured intensity of the first spectral line and a measured intensity of the second spectral line; a step of compensating for the measured intensity of the first spectral line and the measured intensity of the second spectral line using curve approximation results of the correlation plot; a step of obtaining a linear calibration curve using the compensated intensity of the first spectral line and the compensated intensity of the second spectral line; and a step of performing LIBS analysis on a sample to be analyzed and compared the analysis result with the linear calibration curve.