首页> 外国专利> GRAPHENE COATING WITH EXCELLENT ADHESION TO THE HEAT SINK FOR SEMICONDUCTOR PACKAGE AND A METHOD OF MANUFACTURING

GRAPHENE COATING WITH EXCELLENT ADHESION TO THE HEAT SINK FOR SEMICONDUCTOR PACKAGE AND A METHOD OF MANUFACTURING

机译:用于半导体封装的石墨烯涂层,具有出色的附着在散热片上的热沉和制造方法

摘要

According to the present invention, a heat sink for a semiconductor package having the excellent adhesion of graphene coating, and a manufacturing method thereof are capable of improving the adhesion of a graphene coating layer by forming the graphene coating layer after forming a blackening processing film on a surface of the heat sink manufactured by: a base preparation step (S10) of placing a base metal (10) on a press mold; a press step (S20) of applying press processing to the base metal (10) in a preset shape; a chrome separating and heating step (S30) of separating carbon (C) and chrome (Cr) formed in stainless by heating the base metal (10) at 1100°C or greater; a chrome oxidation reaction step (S40) of forming the chrome (Cr) separated from a surface of the base metal (10) into oxidation chrome (Cr_2 O_3) by making the press metal (10) touch decomposition gas (G) formed of nitrogen (N) and hydrogen (H); a blackening processing film step (S50) of oxidizing and extracting the surface of the base metal (10) with the oxidation chrome (Cr_2 O_3); and a graphene coating step (S60) of forming the graphene coating layer (30) by applying graphene solution (Y) containing carbon to an outer surface of the blackening processing film (20).
机译:根据本发明,具有石墨烯涂层的优异粘合性的用于半导体封装的散热器及其制造方法能够通过在其上形成黑化处理膜之后形成石墨烯涂层来改善石墨烯涂层的粘合性。通过以下步骤制造的散热器的表面:基础准备步骤(S10),其将基础金属(10)放置在压模上;冲压步骤(S20),以预定形状对母材(10)进行冲压加工;铬分离加热工序(S30),其是通过将母金属(10)在1100℃以上加热而将不锈钢中形成的碳(C)和铬(Cr)分离的。铬氧化反应步骤(S40),其通过使压制金属(10)接触由氮形成的分解气体(G),将与贱金属(10)的表面分离的铬(Cr)形成为氧化铬(Cr_2O_3)。 (N)和氢(H);变黑处理膜步骤(S50),其利用氧化铬(Cr_2O_3)氧化并提取贱金属(10)的表面;石墨烯涂覆步骤(S60),其通过将含有碳的石墨烯溶液(Y)涂布在黑化处理膜(20)的外表面上而形成石墨烯涂层(30)。

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