METHOD FOR FORMING A NON-REFLECTING MINUTE STRUCTURE AND AN OPTICAL ELEMENT WITH THE NON-REFLECTING MINUTE STRUCTURE

摘要

The present invention relates to a method for forming a non-reflecting minute structure capable of reducing surface reflectance and improving transmittance by being arranged on an irradiation surface of an optical element. The method for forming the non-reflecting minute structure according to the present invention includes: (a) a step of joining a light-transmitting board to an inner board holder of a chamber capable of being cut off from outside; (b) a step of depositing a metallic deposition material on the surface of the light-transmitting board joined to the board holder in a glancing angle deposition (GLAD) method radiating the deposition material to the board at an inclined radiation angle to form minute-patterned structures made of the metallic deposition material on the surface of the light-transmitting board; and (c) a step of polishing the surface of the light-transmitting board by using the minute-patterned structures as a mask pattern until the minute-patterned structures are eliminated to form the non-reflecting minute structures on the light-transmitting board.;COPYRIGHT KIPO 2015