HELICAL RESONANCE PLASMA ANTENNA AND PLASMA GENERATING APPARATUS INCLUDING SAME

摘要

According to an embodiment, disclosed is a helical resonance plasma antenna. The helical resonance plasma antenna comprises a plurality of spiral coils having both end units different from each other. The spiral coils are symmetrically arranged on a shared central axis. About each spiral coil in the spiral coils, one end unit of the both end units is connected to an RF power, and the other end unit is opened. A ground terminal is arranged at a main body of the spiral coil between the both end units. The spiral coils are individually connected in parallel to the RF power.;COPYRIGHT KIPO 2016