LIQUID METAL ION SOURCE, SECONDARY ION MASS SPECTROMETER,SECONDARY ION MASS SPECTROMETRIC ANALYSIS METHOD AND ALSO USES THEREOF

摘要

The present invention is a liquid metal ion source, a secondary mass spec trim and the corresponding analysis and to the use thereof. In particular, the invention relates to a mass spectrometry according to the relief type SIMS (G-SIMS) method . For this purpose , a liquid metal ion source comprising a second metal of the first metal with an atomic weight of atomic 90u 190u is used . In accordance with the present invention, one type of the two types of ions in the G-SIMS method is filtered through a shift from the primary ion beam by mass - guided to the target sequence as a primary ion beam ;