MICROWAVE POWER DELIVERY SYSTEM FOR PLASMA REACTORS

摘要

A microwave power transmission system for supplying a microwave power to a plurality of microwave plasma reactors (8), wherein the microwave power transmission system is configured to be connected to a microwave source (4) and the impedance of a plurality of microwave plasma reactors A tuner 14 configured to match an impedance of the tuner 14; And a waveguide junction (18) connected to the tuner and configured to direct the microwave into a plurality of microwave plasma reactors and also from the microwave plasma reactor; Including a first port to which the waveguide adapter is connected to a tuner, a second port to a respective microwave plasma reactor and a third port, and a fourth port to be connected to a microwave sink 20, ; The waveguide adapter being configured to evenly divide the microwave power coming from the tuner through the first port between the second port and the third port to provide microwave power to the respective microwave plasma reactor; The waveguide adapter is configured to isolate the second port and the third port such that any reflected microwaves from one of the microwave plasma reactors are fed directly to the other microwave plasma reactor across the waveguide adapter to prevent imbalance ; Wherein the waveguide adapter is further configured to send reflected microwaves back through a second port and a third port balancing in size and topology to a tuner such that they can be reflected and reused by the tuner; Wherein the waveguide adapter is further configured to supply an unbalanced excess of reflected power to the microwave absorber through the fourth port.