SILICON SEED ROD ASSEMBLY OF POLYCRYSTALLINE SILICON, METHOD OF FORMING THE SAME, POLYCRYSTALLINE SILICON PRODUCING APPARATUS, AND METHOD OF PRODUCING POLYCRYSTALLINE SILICON

摘要

challenges ; silicon seed rod and the connection member with also secured to improve the contact area, the quality is subjected to stable production. ; means to resolve ; distal end of the silicon seed rod (2) ( 2B) and the body part (2A) to the step portion formed between the silicon seed rod 2 that is supported by a plane perpendicular to the direction extending (2C) is formed on the connecting member (3), the front end portion (2B) the through hole (4) for insertion is formed through the connecting member (3), an open end periphery of the one side (3B) of the through-hole 4 in the connecting member (3) is the other with the open end peripheral edged and formed than the edge of the side (3A), the surface around the open end of the one side and a flat abutment surface (3C) which is orthogonal to the axial direction of the through hole (4), the so as to abut on the supporting surface (2C) of the abutment surface (3C) the silicon seed rod 2, the front end portion (2B) is inserted in the through hole (4). ; vapor-phase growth method, a silicon seed rod assembly, the through-holes, the connecting member, a reaction