VIBRATION MODULE FOR LARGE AREA VIBRATION PLATE AND APPARATUS FOR PROCESSING ON PLATE-SHAPE WORK HAVING THE SAME

摘要

The present invention relates to a vibration module. According to an embodiment of the present invention, the vibration module comprises: a first plate-shaped body having a predetermined shape and an area and consisting of a magnetic substance; a second plate-shaped body arranged in parallel while facing the first plate-shaped body; a plurality of electromagnets regularly arranged and fixated at an interval from one surface of the first body on one surface of the second body, and having the same size; and an elastic member wherein both ends of the first body and the second body are respectively fixated while avoiding a fixated position of the electromagnets. According to the present invention, normal and stable vibration is possible even if a vibration plate is large.