Apparatus and method phase shifting stripe patterns projection for detecting defect of transparent object

摘要

The present invention provides a phase shift projection apparatus and method for detecting a defect in a transparent body and includes a projection unit that emits light of a grid image to a measurement unit to generate a dark field of the measurement object, (300); A measurement unit 200 for allowing the light emitted from the projection unit 300 to pass through the transparent object 210; The measurement unit 200 receives the light that has passed through the measurement object 210 by the light receiving optical system 120 and acquires an image from the camera 110. The Z map which is darkness darkness information extracted from the acquired image And an image acquiring unit (100) for performing defect detection of the measurement object (210) by using the projection optical system (200), thereby realizing a phase shift of repeated grating patterns and adjusting a projection magnification, So that all the light rays passing through the LCD can be incident along the optical axis of the light receiving unit to effectively inspect the light.