REPLICA STAMP FOR SCIL PROCESS AND MANUFACTURING METHOD FOR THEREOF

摘要

The present invention relates to a replica stamp for a substrate conformal imprinting lithography (SCIL) process and a manufacturing method thereof and, more specifically, to a replica stamp for a SCIL process and a manufacturing method thereof, regarding a replica stamp for a SCIL process formed by comprising a glass substrate, an intermediate layer, and a pattern layer replicated with a pattern of a master stamp. The replica stamp is attached with a protection film on the other side of the glass substrate, thereby improving flexibility while maintaining tensile strength of the glass substrate, and increasing a success rate of a SCIL process by mitigating effects of a SCIL process factor.