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A Method for Preparing Aluminum Material Having Ultra Water Repellant Property

机译:一种具有超疏水性能的铝材的制备方法

摘要

The present invention relates to a method for producing a superhydrophobic aluminum material which forms a nano-needle structure composed of aluminum hydroxide. According to one aspect of the present invention, there is provided a method of manufacturing a semiconductor device, comprising: depositing an aluminum material having an aluminum oxide layer in boiling water; And bubbling at least one kind of gas selected from ozone and carbon dioxide gas into the aluminum material immersed in the boiling water. According to the method of the present invention, the dense aluminum hydroxide layer on the surface of the aluminum material is broken into nano-size by the cavitation of ozone or carbon dioxide gas bubbled into the aluminum material in the boiling water to form a nano-sized needle-like structure. Therefore, by the method according to the present invention, a nano-acicular structure made of aluminum hydroxide which shows super water repellency on the surface of aluminum material is formed by a simple process. Further, the nano-sized needle-shaped structure formed on the surface of the aluminum material by the method of the present invention has a hydroxy (OH) group on the surface, so that it can easily form a covalent bond with other coating materials coated on the surface of the needle- , It is possible to form a solid and uniform additional water repellent coating layer on the nano-sized needle-shaped structure surface.
机译:本发明涉及形成由氢氧化铝构成的纳米针结构的超疏水铝材料的方法。根据本发明的一个方面,提供了一种制造半导体器件的方法,包括:将具有氧化铝层的铝材料沉积在沸水中;以及将具有氧化铝层的铝材料沉积在沸水中。然后将至少一种选自臭氧和二氧化碳的气体鼓泡到浸入沸水中的铝材料中。根据本发明的方法,通过在沸腾水中鼓泡到铝材料中的臭氧或二氧化碳气体的空化作用,铝材料表面上的致密氢氧化铝层被破碎成纳米级。大小的针状结构。因此,通过根据本发明的方法,通过简单的工艺形成了由氢氧化铝制成的在铝材料的表面上显示出超疏水性的​​纳米针状结构。此外,通过本发明的方法在铝材料的表面上形成的纳米级针状结构在表面上具有羟基(OH),因此其可以容易地与涂覆的其他涂料形成共价键。在针的表面上,可以在纳米尺寸的针状结构表面上形成固体且均匀的附加疏水涂层。

著录项

  • 公开/公告号KR101558926B1

    专利类型

  • 公开/公告日2015-10-12

    原文格式PDF

  • 申请/专利权人 재단법인 포항산업과학연구원;

    申请/专利号KR20100138248

  • 发明设计人 박종원;이경황;

    申请日2010-12-29

  • 分类号C23C26;B05D7/24;C23C22/57;

  • 国家 KR

  • 入库时间 2022-08-21 14:57:36

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