DEPOSITING DOPED ZnO FILMS ON POLYMER SUBSTRATES BY CHEMICAL VAPOUR DEPOSITION UNDER UV ACTION

摘要

FIELD: chemistry.;SUBSTANCE: invention relates to a method of forming a transparent doped layer containing zinc oxide on a polymer substrate for optoelectronic devices and a transparent doped layer. The method includes contacting a polymer substrate with at least one precursor containing a dopant and zinc, and exposing to ultraviolet light during chemical vapour deposition to decompose at least one precursor and deposit a layer on the polymer substrate. The polymer substrate is selected from a group consisting of fluoropolymer resins, polyesters, polyacrylates, polyamides, polyimides and polycarbonates. The contacting step is carried out at pressure approximately equal to atmospheric pressure.;EFFECT: providing a chemical vapour deposition method for depositing doped zinc oxide films on polymer substrates for use in optoelectronics.;12 cl, 1 tbl, 8 dwg, 2 ex