A method for testing a test substrate under defined thermal conditions and thermally adjustable as conditioners prober

摘要

A method for testing a test substrate under defined thermal conditions, wherein the test substrate to be tested by means of a chuck and held on a defined temperature is set, the test substrate by means of at least one positioning device, which has a chuck drive for the positioning of the test substrate, and positioned relative to test probes by the test probes for testing is contacted, characterized in that at least one component of the chuck drive as a in the vicinity of the tempered test substrate component which is located of the positioning device, which comprises a temperature control device, by means of the temperature control device to one of the temperature of the test substrate independent temperature is set and this temperature is kept constant.