X-ray fluorescence spectrometer and x-ray fluorescence analyzer

摘要

An X-ray fluorescence analyzer (30) for analyzing light trace elements contained in a sample (1) to be measured, comprising: an X-ray source (21) having a target emitting primary X-rays (2) for irradiating the sample (1) to be measured with the primary ones X-rays (2); a first spectroscopic unit (22) which decomposes X-ray fluorescence beams (3) emitted from the sample (1); wherein the first spectroscopic unit (22) is shaped to have a curved surface; a second spectroscopic unit (23) which disassembles scattered X - ray beams (4) scattered from the sample (1), the second spectroscopic unit (23) being shaped to have a curved surface, the X - ray scattering beams (4) being dependent on the Target material of the X-ray source (21) and regardless of the content of the trace elements contained in the sample (1); a single X-ray detector (24) positioned so as to be capable of receiving the X-ray fluorescence beams (3) dissected by the first spectroscopic unit (22) and the X-ray scattered beams (4) disassembled by the second spectroscopic unit (23) and receiving the X-ray fluorescence beams (3) and the X-ray scattering beams (4); and a calculation unit (34) that determines an intensity ratio between the X-ray fluorescence beams (3) and the X-ray scattered beams (4) detected by the single X-ray detector (24), and the content of a trace element in the sample (1) based on the detected intensity ratio and a calibration curve.