Circuit for bipolar charge return obtaining of a piezoelectric drive, method for the control of the drive and a micromechanical drive

摘要

The invention relates to a circuit (200) for the bipolar charge return production of a piezoelectric or electrostatic drive, characterized in that a piezo - actuator (c._piezo) with a coil (l_drive) is connected in series, wherein a first connection of the piezo-electric - actuator (c._piezo) with a first switch (s1) and a second switch (s2) is connected, whereby a first terminal of the coil (l_drive) with a third switch (s3) and a fourth switch (s4) is connected, wherein a second terminal of the piezo-electric - actuator (c._piezo) with a second terminal of the coil (l_drive) is connected, wherein the first switch (s1) and the third switch (s3), to a first terminal of a voltage supply (dc) are connected, and wherein the second switch (s2) and the fourth switch (s4) with a second terminal of the voltage supply (dc) are connected.