GRAVIMETRIC GAS SENSOR WITH REDUCED DETECTION LIMIT

摘要

Gravimetric detector comprising a nanoelectronic structure comprising: a fixed part (2), at least one suspended part (4) with respect to the fixed part (2), excitation means (8) so as to put in vibration the suspended part relative to the fixed part, - detection means (10) of the vibration variations of said suspended part, - a porous functionalization layer (6) covering at least part of the suspended part (4) the porosity of said functionalization layer (6) being between 3% and 50%.