Micro-channel plate, method for manufacturing micro-channel plate, and image intensifier

摘要

The present invention is characterized in that an electron emission film (36) formed on the inner wall surface of a channel (32) in a base body (31) and an ion barrier film (37) covering the opening on the side of the front surface (4a) of the base body in the channel are integrally formed in the same film-forming process in a micro-channel plate (4) for an image intensifier. Thereby, the electron emission film and the ion barrier film are continuously formed as a strong film so that the ion barrier film can be formed as a thin film. Further, the residue of an organic film that is formed in the manufacturing process is suppressed, and therefore it is possible to control a reduction in performance of the ion barrier film due to the residual organic film. Thus, the ion feedback from a micro-channel plate is minimized and the operating life of an image intensifier can be sufficiently improved.